MEMS Device for Quantitative In Situ Mechanical Testing in Electron Microscope
نویسندگان
چکیده
منابع مشابه
MEMS Device for Quantitative In Situ Mechanical Testing in Electron Microscope
In this work, we designed a micro-electromechanical systems (MEMS) device that allows simultaneous direct measurement of mechanical properties during deformation under external stress and characterization of the evolution of nanomaterial microstructure within a transmission electron microscope. This MEMS device makes it easy to establish the correlation between microstructure and mechanical pro...
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In this work, we designed a MEMS device which allows simultaneous direct measurement of mechanical properties during deformation under external stress and characterization of the evolution of microstructure of nanomaterials within a transmission electron microscope. This MEMS device makes it easy to establish the correlation between microstructure and mechanical properties of nanomaterials. The...
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M. Legros, D.S. Gianola, and C. Motz about the surface (e.g., optical and SEM) but have some advantages with regard to temporal resolution over 3D probing technologies, which can require long acquisition times to enhance the signal quality. Figure 1 is a three-axis map of the main in situ tools used to investigate deformation mechanisms. The first two axes are the strain resolution and the leng...
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Related to the dramatically smaller volume of microelectromecanical systems (MEMS), new methods in testing and qualification are needed. On single crystal silicon (SCSi) based devices, stress and loading in operation introduces defects during the MEMS life time and increases the risk of failure. Reliability studies on potential failure sources have an impact on MEMS design and are essential to ...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2017
ISSN: 2072-666X
DOI: 10.3390/mi8020031